February 08, 2010
Download Complete
Product List
(PDF format)
Thin Film Metrology: Ellipsometers, Prism couplers, Nanospecs, Stylus Profilers, Flexus
| Ellipsometers, single point, mapping, spectroscopic | ||
| Mfg Name | Model # / Name | Ref # |
| Gaertner | L115C - Mapping ellipsometer with 200mm motorized and PC controlstage |
R-2246 click for details |
| Gaertner | L115S - Variable angle Stokes ellipsometer with Waferscan high speed mapping capability |
R-2228 click for details |
| Gaertner | L115S-8 - Variable angle Stokes ellipsometer with Waferscan high speed mapping capability, 200mm wafer stage |
R-3638 click for details |
| Gaertner | L115S-8 - 200mm mapping ellipsometer with Stokes detector |
R-2137 click for details |
| Gaertner | L116S - Variable angle Stokes ellipsometer with single wavelength, 200mm wafer stage, and software |
R-3285 click for details |
| Jobin Yvon-SPEX/Horiba | UVISEL - UVISEL spectroscopic phase modulated ellipsometer with 200-800nm range and wafer handler |
R-2957 click for details |
| Plasmos | SD2000 - Mapping ellipsometer with 632.8nm microspot, motorized xy stage, and autofocus |
R-3624 click for details |
| Plasmos | SD2000 - Automatic mapping ellipsometer with scanning stage |
R-1874 click for details |
| Rudolph | EL 3, SS292 - Ellipsometer with automatic scanning stage |
R-3694 click for details |
| Film Stress Measurement | ||
| Mfg Name | Model # / Name | Ref # |
| Frontier Semiconductor Measurements Inc. | 128L C2C - 300mm tool for stress measurement and wafer bow with Asyst FOUP loaders. |
R-3792 click for details |
| Frontier Semiconductor Measurements Inc. | FSM 900TC-VAC-200mm - Film stress to 900C, configured for 200mm wafers, integrated RGA, vacuum to 1x10E-6 |
R-3780 click for details |
| Frontier Semiconductor Measurements Inc. | FSM128 - tool with auto cal, auto-intensity, motorized 200mm stage, 8s scan |
R-3789 click for details |
| KLA-Tencor | FLX-2908 - 900C film stress measurement tool for wafers from 125mm-200mm |
R-3743 click for details |
| Nanospecs, Spectrometric, Broadband Spectroscopy (N&K) | ||
| Mfg Name | Model # / Name | Ref # |
| N&K Technology | 1200 - Broadband Spectroscopic film analyzer |
R-1851 click for details |
| Nanometrics | 181 - Automatic film thickness gauge for measures 11 film types |
R-2943 click for details |
| Nanometrics | 4150 - Tabletop film thickness measurement tool with autofocus and mapping stage |
R-3510 click for details |
| Nanometrics | 8300X - 200mm/300mm film measurement tool with spectroscopic ellipsometer and UV capability |
R-3526 click for details |
| Nanometrics | AFT-210 - Film thickness measurement system for transparent films on wafers up to 200mm |
R-3623 click for details |
| Nicolet | ECO-8S - FT-IR for wafer analysis on 125-200mm wafers, performs EPI, BPSG, CO, SINH |
R-3888 click for details |
| Prism Couplers | ||
| Mfg Name | Model # / Name | Ref # |
| Metricon | 2010 |
R-3820 click for details |
| Metricon | 2010 - Prism coupler with 633nm HeNe laser, PC, monitor, Seiko printer |
R-2954 click for details |
| Metricon | 2010 - Prism coupler with 633nm HeNe laser, PC, monitor, Seiko printer |
R-3008 click for details |
| Metricon | 2010 - Prism coupler with 633nm HeNe laser, PC, monitor, Seiko printer |
R-2397 click for details |
| Metricon | 2010 - Prism coupler with 532nm green laser and 633nm red laser |
R-2431 click for details |
| Metricon | 2010 - Prism coupler with 633nm and 1550nm laser sources |
R-2450 click for details |
| Film Thickness Mapping, KLA-Tencor UV-10XX, SM & FT series | ||
| Mfg Name | Model # / Name | Ref # |
| KLA-Tencor | SM300 - Thin Film mapping tool for up to 200mm wafers, display s 3-D plots, diameter scans, and wafer maps |
R-3195 click for details |
| KLA-Tencor | UV-1080 - Thin film measurement tool with broadband UV optics and dual beam spectrophotometry |
R-3196 click for details |
| Prometrix | FT-700 - mapping system patterned wafer |
R-514 click for details |
| Opto-Acoustic Film Thickness | ||
| Mfg Name | Model # / Name | Ref # |
| Philips | Impulse 300 - Non destructive film thickness and uniformity on metal films |
R-3481 click for details |
| Stylus Film Thickness Profilers | ||
| Mfg Name | Model # / Name | Ref # |
| KLA-Tencor | P11 - Long scan profiler with MicroHead SR low force measurement head |
R-2327 click for details |
| KLA-Tencor | P15 - High resolution surface profiler with Microhead sr, 300um vertical range, scanning force of 1-50mg |
R-3595 click for details |
| Sloan | Dektak 1A - Stylus profiler with fast leveling module (FLM), and chart recorder, rebuilt by MM&R |
R-3681 click for details |
| Veeco | Dektak 3 - Stylus profiler with Windows PC interface, 10A repeatability, 1 button scan operation |
R-3821 click for details |
| Veeco | V200-Si - Stylus profiler for up to 200mm substrates. Windows interface. |
R-3222 click for details |
| Thermawave Optiprobe | ||
| Mfg Name | Model # / Name | Ref # |
| Thermawave | OP 5300P - 300mm film metrology tool with multiple measurement techniques: BPR, BPE, AE, RCSE, BB |
R-3381 click for details |
| Tilt Bias Angle Measure-LCD | ||
| Mfg Name | Model # / Name | Ref # |
| Autronic-Melchers GmbH | TBA-101 - Measures tilt bias angle and cell gap of LCD's |
R-2042 click for details |