Plasma Etchers/ Ashers: Single Wafer Process

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Gasonics Aura 1000 Downstream Microwave Asher

Manufacturer: Gasonics
Name/Model: Aura 1000
Reference: R-4489

$25,000.00

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Lam Research/Aspect Systems 590 Oxide Auto Etcher

Manufacturer: Lam Research
Name / Model#: 590
Reference #: R-2711
Mfg Date: 01-Aug-00

$29,500.00

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