September 04, 2010

 


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Film Thickness Mapping, KLA-Tencor UV-10XX, SM & FT series
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Manufacturer: Prometrix
Name / Model#: FT-700
Reference #: R-514
Serial #: 9307FT700-01/5000 AIC PH
Description:
mapping system patterned wafer, single& double layer films, 100-200mm wafers, 410nm-800nmreflectivity range, wafer handling, prealignment, &sorting; 3-D, contour, & die mapping, autofocus, 1.5-5second measurement time, automatic 5 objective opticalimaging
Price: $14,900.00