September 04, 2010
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| Film Stress Measurement | |
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| Manufacturer: | Frontier Semiconductor Measurements Inc. |
| Name / Model#: | FSM128 |
| Reference #: | R-3789 |
| Serial #: | 010717-404 |
| Mfg Date: | 17-Jan-01 |
| Description: Dual wavelength film stress metrology tool with auto calibration, auto-intensity, motorized 200mm stage, 8000 point scan on 200mm wafer in 8s with 1 sigma repeatability. Dual laser 750nm/810nm technology allows measurement of all film types including nitrides, metals, oxides, polyimides, etc. at room temperature, measures 3"-8" wafers either bare or patterned. 110v/ 208v Refurbished and calibrated by factory October, 2007, PC included (not shown in photo) |
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| Price: | $24,900.00 |