September 04, 2010
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| Film Stress Measurement | |
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| Addt'l Photo(s): |
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| Manufacturer: | Frontier Semiconductor Measurements Inc. |
| Name / Model#: | FSM 900TC-VAC-200mm |
| Reference #: | R-3780 |
| Serial #: | 00128327 |
| Mfg Date: | 01-May-00 |
| Description: Rapid thermal mechanical evaluation of low k, copper, barrier, high k, measures film stress hysteresis to 900C, thermal stability evaluation, coefficient of thermal expansion and desorption studies, configured for 200mm wafers, integrated RGA to measure outgassing, vacuum to 1x10E-6 using Varian Turbo-Dry 70 pumping system |
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| Price: | $95,000.00 |