September 04, 2010
Download Complete
Product List
(PDF format)
| Film Stress Measurement | |
|
|
| Addt'l Photo(s): | Click for View 2 |
| Manufacturer: | KLA-Tencor |
| Name / Model#: | FLX-2908 |
| Reference #: | R-3743 |
| Serial #: | 0894-4349 |
| Mfg Date: | 01-Aug-94 |
| Description: film stress measurement tool for wafers from 125mm-200mm at temperatures up to 900C, inert gas capability for measurements in N2, Ar2 or forming gas, dual wavelength technology, MS Windows based software ver. 3.02 for calculation of biaxial modulus of elasticity and linear expansion, water diffusion coefficient in dielectric films, linear regression and stress-temp or stress-time gradients, measurement time 6 seconds for 200mm wafer, 230v, 50/60hz |
|
| Price: | $35,000.00 |