September 04, 2010
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| Nanospecs, Spectrometric, Broadband Spectroscopy (N&K) | |
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| Manufacturer: | Nanometrics |
| Name / Model#: | AFT-210 |
| Reference #: | R-3623 |
| Serial #: | 1108-5202-0001 |
| Mfg Date: | 21-Apr-88 |
| Description: Film thickness measurement system for transparent films on wafers up to 200mm wafers, measures 14 standard film types including photoresists, polyimides, polysilicon, oxides, and nitrides in ranges from 100A to 500kA. Typical measurement time 2.5 seconds. Olympus MS Plan 5, 10, 40x objectives, 6x6 xy stage. printer, 7002-0066 Rev.2, 110v (upgrade with Semprex XY 200mm stage with full 8x8 travel and 6"/8" wafer paddle add $2000.00), |
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| Price: | $14,900.00 |