September 04, 2010

 


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Opto-Acoustic Film Thickness
Manufacturer: Philips
Name / Model#: Impulse 300
Reference #: R-3481
Serial #: 01771
Description:
Performs non destructive thickness measurement and uniformity of metal films on maximum 200mm wafers utilizing the acoustic technique of ISTS (impulsive stimulated thermal scattering). The width and elasticity of materials are quantified by measuring the ultrasonic waves from metal after irradiation by laser light. Equipe robot, prealigner, and controller. Version 2.8 software.
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