September 04, 2010
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Product List
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| Thermawave Optiprobe | |
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| Addt'l Photo(s): |
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| Manufacturer: | Thermawave |
| Name / Model#: | OP 5300P |
| Reference #: | R-3381 |
| Serial #: | 8030, 8047 |
| Mfg Date: | 01-Feb-00 |
| Description: 300mm film metrology tool using complementary multiple technologies for measurement of films down to 0.1Ang: beam profile ellipsometry (BPE) and beam profile reflectometry (BPR), Windows NT operating system, Asyst SMIF robot with dual 300mm pod carriers. |
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| Price: | $49,500.00 |