September 04, 2010
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| Ellipsometers, single point, mapping, spectroscopic | |
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| Manufacturer: | Gaertner |
| Name / Model#: | L116S |
| Reference #: | R-3285 |
| Serial #: | 1796-AK |
| Mfg Date: | 01-Oct-01 |
| Description: Variable angle ellipsometer with Stokes detector, single wavelength 633nm He laser, film thickness range 60kA, 200mm wafer stage with manual xy and rotation, interface cable, software. Measures most single layer thin film nitrides, oxides, and photoresists with single Angstrom precision as well as thick film polyimides and photoresists. |
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| Price: | $23,900.00 |