September 04, 2010
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| Film Thickness Mapping, KLA-Tencor UV-10XX, SM & FT series | |
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| Manufacturer: | KLA-Tencor |
| Name / Model#: | UV-1080 |
| Reference #: | R-3196 |
| Serial #: | 961275 UV1050R |
| Mfg Date: | 01-Dec-96 |
| Description: Thin film measurement tool with broadband UV optics and dual beam spectrophotometry, applications include polysilicon, UV reflectivity, and simultaneous oxide and TiN thickness for CMP applications, Windows NT Summit ver. 2.5 software with GUI, simultaneous multilayer and ESML measures over 500 discrete wavelengths, SECS II interface included, 110v Note: this tool was upgraded from a UV-1050 to a UV-1080 by KLA-Tencor. |
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| Price: | $35,000.00 |