September 04, 2010
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| Film Thickness Mapping, KLA-Tencor UV-10XX, SM & FT series | |
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| Addt'l Photo(s): |
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| Manufacturer: | KLA-Tencor |
| Name / Model#: | SM300 |
| Reference #: | R-3195 |
| Serial #: | 950701 SM300 |
| Mfg Date: | 01-Jul-95 |
| Description: Thin Film mapping tool for up to 200mm wafers, utilizing a reflected light intensity technique the Spectramap Auto SM300 maps dielectric films and resists on monitor wafers. A wide range of film types and thicknesses can be characterized and displayed as 3D plots, diameter scans, or wafer topography maps |
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| Price: | $18,500.00 |