July 28, 2010
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Product List
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| HMDS Vapor Prime | |
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| Manufacturer: | Yield Engineering |
| Name / Model#: | 6112A |
| Reference #: | R-2404 |
| Serial #: | 87792 |
| Description: HMDS vacuum bake/vapor prime oven with throughput of 2 full loads/hour. Temperature 275C maximum, cleanliness less than 10 x 0.5u particle per 8 inch wafer. Alcatel M2008A vacuum pump 4 compartments each 9.75"w x 9.75"h x 15"deep will hold: 4 cassettes of 8" wafers 8 cassettes of 5" or 6" wafers 12 cassettes of 4" wafers |
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| Price: | $12,900.00 |