September 04, 2010
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| Ellipsometers, single point, mapping, spectroscopic | |
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| Addt'l Photo(s): | Click for View 2 |
| Manufacturer: | Gaertner |
| Name / Model#: | L115S-8 |
| Reference #: | R-2137 |
| Serial #: | 1617AK |
| Mfg Date: | 01-Nov-94 |
| Description: Variable angle Stokes ellipsometer with Waferscan high speed mapping capability, measures 49 sites in 49 seconds, 2D/3D color thickness and index maps, single layer oxides, nitrides, photoresist film thickness range 0-60k Angstroms with 1A precision, 200mm wafer stage, Klinger CC1.2 xy stage controller, new laser installed 4/96 |
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| Price: | $26,000.00 |